Nanotechnology

Nanophase Research, U.S. West Coast
Construction of a 12,000 ft2 nanotechnology research facility.

  • Class 100/1,000/10,000 (ISO 5, 6, 7).
  • Modular wall system, automatic doors.
  • Plenum/ flush grid ceiling system.
  • Cleanroom furniture.
  • Testing and certification.

Nanophase Materials Science Research, Southeast U.S.
Construction of a 9,600 ft2 nanotechnology research facility.

  • Class 100/1,000/100,000 (ISO 5, 6, 8).
  • Modular wall system and anti-static flooring.
  • Stainless steel sound-insulated and automatic sliding doors.
  • Walkable cleanroom ceiling system.
  • Cleanroom construction protocol and cleaning procedures.
Project Feature Summary

Nanotechnology Materials Science Research, U.S. West Coast
Design and construction of a 2,000 ft2 nanotechnology research facility.

  • Class 100/1,000 (ISO 5, 6).
  • Photolith: 68°F ± 1°F & 44% RH ± 3% RH
  • Thin Film: 68°F ± 2°F and 45% RH ± 5% RH.
  • EMI shielding, modular walls, plenum ceiling with ionization.
  • Acid & solvent exhaust with catastrophic abatement.
  • CDA, process vacuum, nitrogen, high purity.
  • Process cooling water, DI water, acid waste neutralization.
  • Controls, process electrical, card reader.
  • VESDA fire alarm, toxic gas monitoring, & liquid leak detection.
Project Feature Summary

Nanotechnology Research, Southeast U.S.
Design and construction of a 1,600 ft2 nanotechnology research facility.

  • Class 10 (ISO 4).
  • Photolith: 68°F ± 0.18°F & 45% RH ± 5% RH
  • Modular walls, raised floor, ionization, auto sliding door.
  • Acid & solvent exhaust.
  • CDA, nitrogen, high purity, process cooling water, DI water.
  • Controls, fire alarm, card reader, process electrical.
  • Luwa has completed multiple cleanroom projects at this university.
Project Feature Summary

Nanofabrication Laboratory, Southwest U.S.
Design and construction of a 6,400 ft2 nanofabrication research and teaching facility.

  • Class 1,000/100,000 (ISO 6, 8).
  • 68°F ± 2°F & 45% RH ± 2% RH.
  • Modular walls, raised floor & anti-static flooring.
  • Acid & solvent exhaust.
  • CDA, nitrogen, high purity gases, vacuum, acid waste.
  • Controls and electrical.