Semiconductor / Microelectronics

MEMS Fabrication, Northwest U.S.
Turnkey design and construction of a 12,000 ft2 ground-up, MEMS manufacturing facility. Luwa was responsible for all phases of this fast-track project, including: engineering, building/site construction, cleanroom installation, and all associated permitting.

Project 1
  • Class 10/1,000/10,000 (4500 ft2).
  • Temperature: 68°F ± 2°F; Humidity: 45% RH ± 5% RH.
  • High hazard H-6 (semiconductor fabrication) occupancy.
  • Modular wall, raised floor, Luwa Membrane Diffusion® ceiling.
  • Central plants: chilled & hot water, steam, RO/DI water, etc.
  • Architectural, structural, mechanical, electrical systems.
  • Acid & solvent exhaust, including central acid scrubber.
  • Process piping & equipment: Clean dry air, nitrogen, vacuum, DI water, process chilled water; acid waste neutralization.
  • All high purity gas and hazardous gas systems.
  • Controls, fire alarm and toxic gas monitoring systems.
  • Tool layout, HMIS, HMMP and Owner tool fit-up.
Project Feature Summary

Optoelectronics Manufacturing, Northeast U.S.
Turnkey design and construction of a 17,000 ft2 optoelectronics manufacturing facility, including MOCVD processes.

  • Class 1,000/10,000 (ISO 6, 7).
  • Temperature: 68°F ± 2°F; Humidity: 45% RH ± 5% RH.
  • Hazardous Production Material (HPM) fab area, H-2 storage.
  • Some Class 1, Div. 1 & 2 electrical; emergency power.
  • Acid & solvent exhaust, including catastrophic abatement.
  • Process piping & equipment: CDA, bulk N2 & H2, vacuum, DI water, process chilled water, acid waste neutralization.
  • All high purity gas and hazardous gas systems.
  • Controls, fire alarm and toxic gas monitoring systems.
  • Tool layout, HMIS and Owner tool fit-up.
Project Feature Summary

Microelectronics Fabrication, Costa Rica                                            
Design and construction of a 26,860 ft2 ground-up, microelectronics manufacturing facility.

  • Class 1,000/10,000 (7,500 ft2).
  • Temperature: 68°F ± 2°F; Humidity: 45% RH ± 5% RH.
  • Architectural, structural, civil, mechanical, electrical and process systems.
  • 750 kVA UPS for process power.
  • CDA, process vacuum, DI water, exhaust, high purity gases.
  • Tool layout and Owner tool fit-up.

Luwa installed the first two nitrogen generators in the country at this site. Luwa has performed other cleanroom work for this customer.

Project Feature Summary

Semiconductor Manufacturer, Southeast U.S.
Turnkey design and construction of an 8,000 ft2 chemical mechanical planarization (CMP) area.

  • Class 10/100 (ISO 4, 5).
  • HVAC, including equipment, chilled water, hot water & steam piping.
  • Architectural (including modular walls) and Electrical.
  • Process Systems, including process vacuum, clean dry air, nitrogen, and acid exhaust ductwork.

Luwa has completed four (4) other projects at this location.

MEMS Fabrication, Southwest U.S.
Turnkey design and construction of a 120,000 ft2 ground-up, microelectronics manufacturing facility. Luwa was responsible for all phases of this fast-track project, including: site evaluation, engineering, building/site construction, office build-out, cleanroom installation, and all associated permitting.

  • Class 100-100,000 (> 11,000 ft2).
  • Temperature: 68°F ± 2°F; Humidity: 45% RH ± 5% RH.
  • Extra 75,000 ft2 mechanical/process intensive manufacturing area.
  • Central plants: chilled water, hot water, steam, RO/DI water, etc.
  • Architectural, structural, mechanical, electrical systems.
  • Acid & solvent exhaust, including central acid scrubber.
  • Process piping & equipment: Clean dry air, nitrogen, process vacuum, DI water, process chilled water; acid waste neutralization, solvent waste collection.
  • All high purity gas and hazardous gas systems, hazardous gas storage areas.
  • Controls, fire alarm and toxic gas monitoring systems.
  • Power static switching from independent utility grids with automatic switching.
  • Tool layout, HMIS and Owner tool fit-up.
Project Feature Summary

Semiconductor Manufacturer, Midwest U.S.
Turnkey design and construction of a 26,000 ft2 semiconductor facility.

  • Class 100/1,000 (ISO 5, 6)
  • Temperature: 70°F ± 2°F, Humidity: 45% ± 5% RH.
  • Central plants: chilled & hot water, process cooling water.
  • Architectural, mechanical, electrical and process.
  • Corrosive scrubber & cyanide exhaust systems.
  • Process systems: DI water, CDA, gaseous & liquid nitrogen, carbon dioxide, process cooling water, vacuum, wastewater.
  • Cyanide detection system.
  • Owner tool fit-up.